Oxford Vacuum Science VapourStation Bench-Top Thermal Evaporator
Ultra-compact, low cost, air-cooled bench-top thermal evaporator
?400A air-cooled VapourPhase Ω thermal evaporator with up to four sequentially switched evaporation source clamp sets ?removeable DN 100 ISO-K substrate mounting flange for substrates up to ?75mm (3") ?supplied with four sliding clamps with 6 x 4 mounting points to accommodate all substrate sizes ?quartz crystal deposition monitor head ?integrated substrate shutter ?choice of 75 l/s or 240 l/s wide-range hybrid turbo pump with 3m3/hr dry scroll roughing pump for rapid evacuation ?three function (PUMP, LOAD, VENT) or four function (PUMP, LOAD, STORE, VENT) front panel with 12 decade LED bar graph pressure display ?full, embedded PC control with user-friendly interface and multiple serial & USB communications & power distribution ports ?485mm x 495mm (19"x19?") total footprint (excluding keyboard and monitor) ?deposition view, glass jar internal deposition baffle and work-table accessories available
