Spectra Physics Spirit适用于高精度工业制造中的用于聚合物、薄金属、蓝宝石、聚晶金刚石和许多其他材料的微加工，提供高平均功率、高脉冲能量和高重复率，以提高产量。
Spirit 1040 nm (16 W output power, 1 MHz rep. rate, pulse widths < 400 fs) + OPA system (210 nm -16 μm)
OPA: 630-1020 nm, 1040-2600 nm
OPA-UV3: 210-255 nm, 260-315 nm, 520-630 nm
OPA-DFG2: 2.2-16 μm
Wavelength | 1040 nm ±8 nm |
Output Power | >16 W |
Pulse Energy | >120 μJ at 100 kHz |
Wavelength (SHG) | 520 ±3 nm |
Output Power (SHG) | >6 W at 100 kHz
>8 W at 200 kHz |
Max Pulse Energy (SHG) | >60 μJ at 100 kHz
>40 μJ at 200 kHz |
Repetition Rates1,3 | 100 kHz, 200 kHz or 1 MHz |
Pulse Selection | Integrated pulse picker (AOM) |
Pulse Width | <400 fs |
Pulse Width Tunability4, 5 | <400 fs to 10 ps at 1040 nm
<400 fs to 2 ps at 520 nm |
Power Stability | <1% rms over 100 hours |
Pulse-to-Pulse Stability | <2% rms |
Spatial Mode | TEM00 (M2 <1.2) |
Beam Diameter | 2.5 ±0.5 mm |
Beam Divergence, full angle | <1 mrad at 1040 nm;<0.5 mrad at 520 nm |
Burst Mode6,7 | >120 μJ/burst at 1040 nm |
Pre-Pulse Contrast Ratio | >250:1 |
Polarization | Horizontal |
Cold Start Time | <30 min. |
Warm Start Time | <15 min. |
应用：
OLED 显示屏制造
半导体晶圆切片
聚合物切割
金属钻孔和切割
硬脆材料的精密加工
多晶金刚石(PCD)切割和烧蚀
蓝宝石切割和钻孔
三光子显微镜
光参量放大器泵浦
